• ÃøÁ¤ ¹üÀ§: 25 ~ 150mm stroke
• Resolution(ºÐÇØ´É): ¹«ÇÑ´ë
• Displacement speed: 5m/sec
• Repeatability(¹Ýº¹Á¤¹Ðµµ): 0.01mm
• Independent Linearity(Á÷¼±¼º): 0.05%
• º¸È£µî±Þ : IP 40
• Á¦Ç° ¼ö¸í: 25x106 meters, 100x106 operations