• ÃøÁ¤ ¹üÀ§: 100 ~ 550mm stroke
• Resolution(ºÐÇØ´É): ¹«ÇÑ´ë
• Displacement speed: 1.5m/sec
• Repeatability(¹Ýº¹ Á¤¹Ðµµ): 0,01mm
• Independent Linearity(Á÷¼±¼º): 0.1%
• Á¦Ç° ¼ö¸í: 25x106 meters, 100x106 operations